On the ion energy transfer to the substrate during titanium deposition in a hollow cathode arc discharge

By Kersten H.   Steffen H.   Wagner H.E.   Vender D.  

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Elsevier

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Erosion and deposition during the sputter cleaning of substrates prior to the cathodic arc evaporation of transition metal nitride coatings

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Deposition and modification of titanium dioxide thin films by filtered arc deposition

By Bendavid A.   Martin P.J.   Takikawa H.  

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Effects of deposition parameters on the texture of chromium films deposited by vacuum arc evaporation

By Gautier C.   Machet J.  

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Properties of titanium oxide film prepared by reactive cathodic vacuum arc deposition

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