Synthesis of Ti-N thin films prepared by dynamic ion mixing technique and their mechanical properties

Author： Hayashi T. Matsumuro A. Muramatsu M. Takahashi Y. Yamaguchi K.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 199-204

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