Enhancement of polymerization in CH 3 SiO 3/2 coating film by gaseous amines

Author: Zhang Z.   Wakabayashi H.   Tanigami Y.   Terai R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 24-28

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Abstract