Texture of copper films on Ta 35 Si 18 N 47 and Ti 33 Si 23 N 44 underlayers

Author: Tsuji Y.   Gasser S.M.   Kolawa E.   Nicolet M.-A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.350, Iss.1, 1999-08, pp. : 1-4

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Abstract