Prevention of adhesion failure of a W/TiN/Ti(Co) layer on SiO 2

Author： Kim J.S.   Shin Y.C.   Lee K.T.   Kang W.T.   Kim T.H.   Lee K.Y.   Park Y.J.   Park J.W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.352, Iss.1, 1999-09, pp. : 128-132

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