High-rate reactive deposition of indium oxide films on unheated substrate using ozone gas

Author： Zahirul Alam A.H.M.   Saha P.K.   Hata T.   Sasaki K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.352, Iss.1, 1999-09, pp. : 133-137

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