Microstructure and crystallographic texture of reactively sputtered FeTaN films

Author: Klemmer T.J.   Inturi V.   Minor K.   Barnard J.   Thomas J.   Blachere J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.353, Iss.1, 1999-09, pp. : 16-19

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract