Interfacial reactions in the thin film Y 2 O 3 on chemically oxidized Si(100) substrate systems

Author: Kang S.-K.   Ko D.-H.   Kim E.-H.   Ho Cho M.   Whang C.N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.353, Iss.1, 1999-09, pp. : 8-11

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract