Epitaxial Y 2 O 3 film growth on an oxidized Si surface

Author: Cho M.-H.   Ko D.-H.   Choi Y.K.   Lyo I.W.   Jeong K.   Whang C.N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.402, Iss.1, 2002-01, pp. : 38-42

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Abstract