Investigation on ozone-sensitive In 2 O 3 thin films

Author： Atashbar M.Z.   Gong B.   Sun H.T.   Wlodarski W.   Lamb R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 222-226

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