Characterisation of magnetron sputter deposited MoS x /metal multilayers

Author: Simmonds M.C.   Savan A.   Van Swygenhoven H.   Pfluger E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 59-65

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Abstract