Residual stress in diamond films: origins and modelling

Author: Michler J.   Mermoux M.   von Kaenel Y.   Haouni A.   Lucazeau G.   Blank E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.357, Iss.2, 1999-12, pp. : 189-201

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract