Effect of low energy oxygen ion beam on optical and electrical characteristics of dual ion beam sputtered SnO 2 thin films

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Evidence of -phase in ion beam sputtered zirconium thin films

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Effect of ion beam energy on the electrical, optical, and structural properties of indium tin oxide thin films prepared by direct metal ion beam deposition technique

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Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance

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A review of ion beam assisted deposition of optical thin films

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