FIB micromachined submicron thickness cantilevers for the study of thin film properties

Author: McCarthy J.   Pei Z.   Becker M.   Atteridge D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.358, Iss.1, 2000-01, pp. : 146-151

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Abstract