Micromachined silicon cantilever beams for thin-film stress measurement

Author： Cardinale G.F.   Howitt D.G.   Clift W.M.   McCarty K.F.   Medlin D.L.   Mirkarimi P.B.   Moody N.R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.287, Iss.1, 1996-10, pp. : 214-219

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