Low-temperature passivation of copper by doping with Al or Mg

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Investigation of doping of SnO 2 by ion implantation and application of ion-implanted films as gas sensors

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Thin Solid Films, Vol. 279, Iss. 1, 1996-06 ,pp. : 98-105

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Boron and phosphorus doping of a-SiC:H thin films by means of ion implantation

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Tungsten doping into vanadium dioxide thermochromic films by high-energy ion implantation and thermal annealing

By Jin P.   Nakao S.   Tanemura S.  

Thin Solid Films, Vol. 324, Iss. 1, 1998-07 ,pp. : 151-158

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Si/SiGe n-type inverted modulation doping using ion implantation

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Thin Solid Films, Vol. 369, Iss. 1, 2000-07 ,pp. : 324-327

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