Boron and phosphorus doping of a-SiC:H thin films by means of ion implantation

Author： Demichelis F. Crovini G. Pirri C. Tresso E. Galloni R. Summonte C. Rizzoli R. Zignani F. Rava P.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.265, Iss.1, 1995-09, pp. : 113-118

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