![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Demichelis F. Crovini G. Pirri C. Tresso E. Galloni R. Summonte C. Rizzoli R. Zignani F. Rava P.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.265, Iss.1, 1995-09, pp. : 113-118
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Optical pattern formation in a-SiC:H films by Ga + ion implantation
By Bischoff L. Teichert J. Kitova S. Tsvetkova T.
Vacuum, Vol. 69, Iss. 1, 2002-12 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Room-temperature deposition of a-SiC:H thin films by ion-assisted plasma-enhanced CVD
Thin Solid Films, Vol. 283, Iss. 1, 1996-09 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)