Deriving the kinetic parameters for Pt-silicide formation from temperature ramped in situ ellipsometric measurements

Author: Stark T.   Grunleitner H.   Hundhausen M.   Ley L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.358, Iss.1, 2000-01, pp. : 73-79

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Abstract