Analysis of III-V layer stacks on INP substrates using spectroscopic ellipsometry in the NIR spectral range

Author: Bukkems H.G.   Oei Y.S.   Richter U.   Gruska B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.364, Iss.1, 2000-03, pp. : 165-170

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract