Characterization of In 0.48 Ga 0.52 P-based thin-layer structures using spectroscopic ellipsometry

Author: Watanabe K.   Kobayashi K.   Wong C.C.   Xiong Y.-M.   Saitoh T.   Hyuga F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 97-102

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Abstract