Physical properties of thin GeO 2 films produced by reactive DC magnetron sputtering

Author: Lange T.   Njoroge W.   Weis H.   Beckers M.   Wuttig M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.365, Iss.1, 2000-04, pp. : 82-89

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Abstract