Properties of SnO 2 films prepared by DC and MF reactive sputtering

Author: Ruske M.   Brauer G.   Pistner J.   Pfafflin U.   Szczyrbowski J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.351, Iss.1, 1999-08, pp. : 146-150

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Abstract