Adsorption of precursor molecules in the CVD process of (Ba;Sr)titanate simulated by ab-initio calculations

Author: Metzger R.   Werner C.   Spitzer A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.365, Iss.2, 2000-04, pp. : 242-250

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Abstract