Raman study on residual strains in thin 3C-SiC epitaxial layers grown on Si(001)

Author: Zhu J.   Liu S.   Liang J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.2, 2000-06, pp. : 307-311

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Abstract