Infrared study of adsorption and thermal decomposition of Si 2 H 6 on Si(100)

Author: Shinohara M.   Niwano M.   Neo Y.   Yokoo K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 16-20

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Abstract