Tungsten chemical vapor deposition using tungsten hexacarbonyl: microstructure of as-deposited and annealed films

Author: Lai K.K.   Lamb H.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.370, Iss.1, 2000-07, pp. : 114-121

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Abstract