Epitaxial growth of 3C-SiC on Si(001) using hexamethyldisilane and comparison with growth on Si(111)

Author: Teker K.   Jacob C.   Chung J.   Hong M.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.371, Iss.1, 2000-08, pp. : 53-60

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Abstract