Electrical conductive hard-carbon (diamond-like carbon) films formed by i-C 4 H 10 /N 2 supermagnetron plasma chemical vapor deposition method

Author： Kinoshita H.   Takahashi J.   Hando T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.373, Iss.1, 2000-09, pp. : 251-254

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