Detection of deposition rate of plasma-polymerized films by quartz crystal microbalance

Author: Kurosawa S.   Hirokawa T.   Kashima K.   Aizawa H.   Han D.-S.   Yoshimi Y.   Okada Y.   Yase K.   Miyake J.   Yoshimoto M.   Hilborn J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.374, Iss.2, 2000-10, pp. : 262-267

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Abstract