Amorphous SiC films prepared by low-energy cluster beam deposition

By Melinon P.   Keghelian P.   Perez A.   Rousset J. L.   Cadrot A. M.   Malhomme A.   Renouprez A. J.   Aires F. J. Cadete Santos  

Philosophical Magazine. A. Physics of Condensed Matter. Defects and Mechanical Properties, Vol. 80, Iss. 1, 2000-01 ,pp. : 143-154

Taylor & Francis Ltd

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Characterization of granular Ag films grown by low-energy cluster beam deposition

By Bouwen W.   Kunnen E.   Temst K.   Thoen P.   Van Bael M.J.   Vanhoutte F.   Weidele H.   Lievens P.   Silverans R.E.  

Thin Solid Films, Vol. 354, Iss. 1, 1999-10 ,pp. : 87-92

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Low-temperature deposition of highly [100]-oriented MgO films using charged liquid cluster beam

By Rhee S.H.   Yang Y.   Choi H.S.   Myoung J.M.   Kim K.  

Thin Solid Films, Vol. 396, Iss. 1, 2001-09 ,pp. : 23-28

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Effect of ion beam energy on the electrical, optical, and structural properties of indium tin oxide thin films prepared by direct metal ion beam deposition technique

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Thin Solid Films, Vol. 408, Iss. 1, 2002-04 ,pp. : 218-222

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Nanocrystalline silicon carbonitride thin films prepared by plasma beam-assisted deposition

By Cao Z.X.  

Thin Solid Films, Vol. 401, Iss. 1, 2001-12 ,pp. : 94-101

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