Growth of CoSi 2 films on Si (100) substrates by a two-step method

Author: Shi J.   Irie T.   Takahashi F.   Hashimoto M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.375, Iss.1, 2000-10, pp. : 37-41

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Abstract