Sb segregation in Si and SiGe: effect on the growth of self-organised Ge dots

Author: Portavoce A.   Volpi F.   Ronda A.   Gas P.   Berbezier I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.380, Iss.1, 2000-12, pp. : 164-168

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Abstract