Cryogenic deposition of carbon nitride films using a neutralized atomic nitrogen beam

Author: Khabashesku V.N.   Margrave J.L.   Waters K.   Schultz J.A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.381, Iss.1, 2001-01, pp. : 62-68

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