Hot-pressed Ti-Al targets for synthesizing Ti 1-x Al x N films by the arc ion plating method

Author： Kimura A.   Murakami T.   Yamada K.   Suzuki T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.382, Iss.1, 2001-02, pp. : 101-105

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