Ion-assisted growth of Ti 1-x Al x N/Ti 1-y Nb y N multilayers by combined cathodic-arc/magnetron-sputter deposition

Author： Petrov I. Losbichler P. Bergstrom D. Greene J.E. Munz W.-D. Hurkmans T. Trinh T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.302, Iss.1, 1997-06, pp. : 179-192

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