On the growth mechanism of a-Si:H

Author: Kessels W.M.M.   Smets A.H.M.   Marra D.C.   Aydil E.S.   Schram D.C.   van de Sanden M.C.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 154-160

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Abstract