Hydrogenation in laser annealed polysilicon thin-film transistors (TFTs)

Author: Farmakis F.V.   Tsamados D.M.   Brini J.   Kamarinos G.   Dimitriadis C.A.   Miyasaka M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 151-153

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract