Correlation between a-Si:H surface oxidation process and the performance of MIS structures

Author: Aguas H.   Nunes Y.   Fortunato E.   Gordo P.   Maneira M.   Martins R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 185-188

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Abstract