Multilayer structures induced by plasma and laser beam treatments on a-Si:H and a-SiC:H thin films

Author： Mitu B.   Dinescu G.   Dinescu M.   Ferrari A.   Balucani M.   Lamedica G.   Dementjev A.P.   Maslakov K.I.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 230-234

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