Porous silicon a transducer material for a high-sensitive (bio)chemical sensor: effect of a porosity, pores morphologies and a large surface area on a sensitivity

Author： Zairi S.   Martelet C.   Jaffrezic-Renault N.   M'gaeth R.   Maaref H.   Lamartine R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 325-327

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