Thickness dependent electrical resistivity of ultrathin (<40 nm) Cu films

Author： Liu H.-D.   Zhao Y.-P.   Ramanath G.   Murarka S.P.   Wang G.-C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.384, Iss.1, 2001-03, pp. : 151-156

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