Elastic and anelastic properties, internal stress and thermal expansion coefficient of cubic boron nitride films on silicon

Author: Harms U.   Gaertner M.   Schutze A.   Bewilogua K.   Neuhauser H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.385, Iss.1, 2001-04, pp. : 275-280

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Abstract