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Author: Kumar S. Raju V.S. Shekhar R. Arunachalam J. Khanna A.S. Prasad K.G.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 195-200
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Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition
By Kim D.-G. Seong T.-Y. Baik Y.-J.
Thin Solid Films, Vol. 397, Iss. 1, 2001-10 ,pp. :