Author: Motomura H. Imai S.-i. Tachibana K.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.390, Iss.1, 2001-06, pp. : 134-138
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Correlation between CF 2 and C x F y densities in C 4 F 8 plasmas
By Sasaki K. Takizawa K. Takada N. Kadota K.
Thin Solid Films, Vol. 374, Iss. 2, 2000-10 ,pp. :