Growth characterization and properties of diamond-like carbon films by electron cyclotron resonance chemical vapor deposition

Author: Lung B.H.   Chiang M.J.   Hon M.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.392, Iss.1, 2001-07, pp. : 16-21

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract