Proposal of catalytic chemical sputtering method and its application to prepare large grain size poly-Si

Author: Kamesaki K.   Masuda A.   Izumi A.   Matsumura H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 169-172

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Abstract