Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH 4

Author： Nozaki Y. Kitazoe M. Horii K. Umemoto H. Masuda A. Matsumura H.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 47-50

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