Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

Author: Kim D.-G.   Seong T.-Y.   Baik Y.-J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.397, Iss.1, 2001-10, pp. : 203-207

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Abstract