Influence of different physical factors on microstructure and properties of magnetron sputtered amorphous carbon films

Author： Shaginyan L.R. Onoprienko A.A. Britun V.F. Smirnov V.P.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.397, Iss.1, 2001-10, pp. : 288-295

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