Application of inverse problem algorithm for temperature uniformity in rapid thermal processing

Author： Lin S.   Chu H.-S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.402, Iss.1, 2002-01, pp. : 280-289

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Temperature control of rapid thermal processing system using adaptive fuzzy network

By Lin C.-T.   Juang C.-F.   Huang J.-C.  

Fuzzy Sets and Systems, Vol. 103, Iss. 1, 1999-04 ,pp. : 49-65

Elsevier

Access to resources Recommend Favorite

An inverse problem for the acoustics equations: A multilevel adaptive algorithm

By Mastryukov A.  

Numerical Analysis and Applications, Vol. 3, Iss. 3, 2010-07 ,pp. : 263-278

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

An Algorithm for the Solution of the Inverse Problem of the Theory of Shells

By Guk N.   Obodan N.  

Journal of Mathematical Sciences, Vol. 198, Iss. 2, 2014-04 ,pp. : 192-203

Springer Publishing Company

Access to resources Recommend Favorite

Plasma application in thermal processing of materials

By Niu J.   Guo W.   Guo M.   Lu S.  

Vacuum, Vol. 65, Iss. 3, 2002-05 ,pp. : 263-266

Elsevier

Access to resources Recommend Favorite

Formation of vanadium nitride by rapid thermal processing

By Galesic I.   Kolbesen B.O.  

Thin Solid Films, Vol. 349, Iss. 1, 1999-07 ,pp. : 14-18

Elsevier

Access to resources Recommend Favorite